US Patent Issued to Kawasaki Jukogyo on June 16 for "Semiconductor production apparatus system" (Japanese Inventors)

ALEXANDRIA, Va., June 16 -- United States Patent no. 12,657,693, issued on June 16, was assigned to Kawasaki Jukogyo K.K. (Kobe, Japan).

"Semiconductor production apparatus system" was invented by Satoshi Hashizaki (Kobe, Japan), Shinya Kitano (Kobe, Japan), Ryousuke Kanamaru (Kobe, Japan), Katsuhiro Yamashita (Kobe, Japan) and Tomoya Nagasawa (Kobe, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A semiconductor production apparatus system includes a substrate-holding hand; an image capturer for capturing an image of at least a component of a semiconductor production apparatus; and a controller for detecting an anomaly of the component of the semiconductor production apparatus based on the captured ima...