US Patent Issued to JUSUNG ENGINEERING on May 19 for "Substrate processing apparatus" (South Korean Inventors)

ALEXANDRIA, Va., May 19 -- United States Patent no. 12,635,452, issued on May 19, was assigned to JUSUNG ENGINEERING Co. LTD. (South Korea).

"Substrate processing apparatus" was invented by In Woo Back (Gwangju-si, South Korea), Jong Chul Kim (Gwangju-si, South Korea), Yeong Seop Byeon (Gwangju-si, South Korea), In Cheol Yeo (Gwangju-si, South Korea) and Chul Joo Hwang (Gwangju-si, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "The present inventive concept relates to a substrate processing apparatus comprising: a chamber providing a processing space; a lid for covering the top of the chamber; a substrate support part supporting at least one substrate and rotating about a rotation axis such that ...