US Patent Issued to JIANGSU SHENZHOU SEMICONDUCTOR TECHNOLOGY on June 9 for "Remote plasma source (RPS) power coupling circuit and control system" (Chinese Inventors)

ALEXANDRIA, Va., June 9 -- United States Patent no. 12,652,748, issued on June 9, was assigned to JIANGSU SHENZHOU SEMICONDUCTOR TECHNOLOGY Co. LTD (Yangzhou, China).

"Remote plasma source (RPS) power coupling circuit and control system" was invented by Xiaogang Pan (Yangzhou, China), Xiaojun Gu (Yangzhou, China), Yinzhi Shu (Yangzhou, China) and Peiwen Zhu (Yangzhou, China).

According to the abstract* released by the U.S. Patent & Trademark Office: "A remote plasma source (RPS) power coupling circuit and a control system are provided. The RPS power coupling circuit includes a direct-current (DC) voltage source, two current sharing circuits, a three-winding transformer, and a chamber load, where the current sharing circuits each include a...