US Patent Issued to JEOL on March 24 for "Charged particle beam system and control method therefor" (Japanese Inventor)

ALEXANDRIA, Va., March 24 -- United States Patent no. 12,586,750, issued on March 24, was assigned to JEOL Ltd. (Tokyo).

"Charged particle beam system and control method therefor" was invented by Takamitsu Saito (Tokyo).

According to the abstract* released by the U.S. Patent & Trademark Office: "Provided is a charged particle beam system capable of scanning a sample in a short time. The charged particle beam system is operative to scan the sample with a charged particle beam and to obtain a scanned image, and includes a magnetic deflector for producing a magnetic field to deflect the beam, an electrostatic deflector for producing an electric field to deflect the beam, and a controller for controlling both magnetic deflector and electrosta...