US Patent Issued to International Business Machines on March 3 for "Placeholder profile formation for backside contact" (New York, New Hampshire, Vermont Inventors)

ALEXANDRIA, Va., March 3 -- United States Patent no. 12,568,669, issued on March 3, was assigned to International Business Machines Corp. (Armonk, N.Y.).

"Placeholder profile formation for backside contact" was invented by Ruilong Xie (Niskayuna, N.Y.), Jay William Strane (Wappingers Falls, N.Y.), Junli Wang (Slingerlands, N.Y.), Albert M. Chu (Nashua, N.H.) and Brent A. Anderson (Jericho, Vt.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Embodiments of present invention provide a method of forming backside contact. The method includes forming a set of gate stacks on top of a substrate; forming a first recess in the substrate between the set of gate stacks, the first recess having a triangle shape with a po...