ALEXANDRIA, Va., Feb. 24 -- United States Patent no. 12,558,835, issued on Feb. 24, was assigned to International Business Machines Corp. (Armonk, N.Y.).
"Fabrication of asymmetric mandrel structures in semiconductor device" was invented by Pouya Hashemi (Purchase, N.Y.), Steven Holmes (Red Hook, N.Y.), Robert L. Bruce (White Plains, N.Y.), Eric A Joseph (Croton on Hudson, N.Y.) and Yanning Sun (Scarsdale, N.Y.).
According to the abstract* released by the U.S. Patent & Trademark Office: "A semiconductor structure includes a first plurality of mandrel structures extending outwardly from a substrate. Each of the first plurality of mandrel structures includes a first side at a first inclination angle with respect to a surface plane of the su...