US Patent Issued to International Business Machines on Feb. 17 for "FVBP without backside Si recess" (New York, Vermont Inventors)

ALEXANDRIA, Va., Feb. 17 -- United States Patent no. 12,557,320, issued on Feb. 17, was assigned to International Business Machines Corp. (Armonk, N.Y.).

"FVBP without backside Si recess" was invented by Ruilong Xie (Niskayuna, N.Y.), Kisik Choi (Watervliet, N.Y.), Terence Hook (Jericho Center, Vt.), Alexander Reznicek (Troy, N.Y.), Daniel Schmidt (Niskayuna, N.Y.) and Tsung-Sheng Kang (Ballston Lake, N.Y.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A microelectronic structure including a nanosheet transistor that includes a source/drain. A frontside contact that includes a first section located on the frontside of the source/drain and a via section that extends to the backside of the nanosheet transistor...