US Patent Issued to Inspiring Atoms on Oct. 6 for "System and method for delivering pulsed RF power from a single generator to multiple loads" (Singaporean Inventor)

ALEXANDRIA, Va., Oct. 6 -- United States Patent no. 12,755,936, issued on Oct. 6, was assigned to Inspiring Atoms Pte Ltd (Singapore).

"System and method for delivering pulsed RF power from a single generator to multiple loads" was invented by Yang Pan (Singapore).

According to the abstract* released by the U.S. Patent & Trademark Office: "Disclosed herein is a system and method for delivering pulsed RF power from a single generator to multiple loads in semiconductor manufacturing processes. Using a Single-Pole Multi-Throw (SPMT) switch, the controller dynamically selects a load in real time to receive one or a group of pulses. Each pulse is configurable with distinct RF power, frequency, and duration, enabling precise and flexible power ...