US Patent Issued to ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH on Sept. 29 for "Method of characterizing a detection path of a charged particle beam and a charged particle mirror" (Dutch, German Inventors)

ALEXANDRIA, Va., Sept. 30 -- United States Patent no. 12,749,645, issued on Sept. 29, was assigned to ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH (Heimstetten, Germany).

"Method of characterizing a detection path of a charged particle beam and a charged particle mirror" was invented by John Breuer (Munich) and Pieter Kruit (Delft, Netherlands).

According to the abstract* released by the U.S. Patent & Trademark Office: "A method of characterizing a detection path in a charged particle beam system having a primary charged particle beam, comprising positioning a charged particle mirror having a curved equipotential surface on a sample stage of the charged particle beam system; varying a reflection angle of the p...