US Patent Issued to ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH on Oct. 6 for "Deflector for a charged particle beam apparatus, deflecting system, charged particle beam apparatus, and method of fabricating a deflector" (German Inventors)

ALEXANDRIA, Va., Oct. 6 -- United States Patent no. 12,755,923, issued on Oct. 6, was assigned to ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH (Heimstetten, Germany).

"Deflector for a charged particle beam apparatus, deflecting system, charged particle beam apparatus, and method of fabricating a deflector" was invented by Pavel Adamec (Haar, Germany) and Robert Zimmermann (Munich).

According to the abstract* released by the U.S. Patent & Trademark Office: "A deflector for a charged particle beam apparatus is described. The deflector has an axis and is configured to deflect a charged particle beam in a direction perpendicular to the axis, the deflector including a plurality of flat coils including two pairs of ...