US Patent Issued to ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH on June 16 for "Proximity-electrode, charged particle beam device and method for inspecting and/or imaging a sample" (German Inventor)

ALEXANDRIA, Va., June 16 -- United States Patent no. 12,658,401, issued on June 16, was assigned to ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH (Heimstetten, Germany).

"Proximity-electrode, charged particle beam device and method for inspecting and/or imaging a sample" was invented by Stephan Heinrich (Munich).

According to the abstract* released by the U.S. Patent & Trademark Office: "A proximity-electrode for a charged particle beam device is provided, the proximity-electrode including a body having an aperture within the body, and the body having a plurality of protrusions cantilevering radially into the aperture, and the aperture and the protrusions having an n-fold rotational symmetry, where n is an inte...