US Patent Issued to Ichor Systems on March 31 for "Seal insertion tool for a fluid delivery module and method of installing a seal into a fluid delivery module" (California, New York Inventors)

ALEXANDRIA, Va., March 31 -- United States Patent no. 12,589,474, issued on March 31, was assigned to Ichor Systems Inc..

"Seal insertion tool for a fluid delivery module and method of installing a seal into a fluid delivery module" was invented by Stephen Carson (Woodstock, N.Y.) and Randolph Treur (San Luis Obispo, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Apparatuses for controlling fluid flow are important components for delivering process fluids for semiconductor fabrication. These apparatuses for controlling fluid flow require a variety of fluid flow components which are tightly packaged within the apparatuses for controlling flow. Servicing the apparatuses requires specialized equipment an...