US Patent Issued to Ichor Systems on March 17 for "Fluid delivery module" (California Inventor)

ALEXANDRIA, Va., March 17 -- United States Patent no. 12,576,373, issued on March 17, was assigned to Ichor Systems Inc..

"Fluid delivery module" was invented by Michael Vogtmann (Templeton, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Apparatuses for controlling fluid flow are important components for delivering process fluids for semiconductor fabrication. These apparatuses for controlling fluid flow are formed with a variety of fluid flow components, including fluid flow components for mixing fluid flows. Fluid flow components for mixing flows utilize mixing elements configured to receive flows of two or more process fluid flows via fluid inlets, mix the fluid flow within the mixing element, and ...