ALEXANDRIA, Va., Feb. 24 -- United States Patent no. 12,560,186, issued on Feb. 24, was assigned to Ichor Systems Inc..
"Laminar flow restrictor and seal for same" was invented by Sean Joseph Penley (Sparks, Nev.), Zachariah Ezekiel McIntyre (Houston), Tyler James Wright (Reno, Nev.), Matthew Eric Kovacic (Reno, Nev.) and Christopher Bryant Davis (Georgetown, Texas).
According to the abstract* released by the U.S. Patent & Trademark Office: "Apparatuses for controlling gas flow are important components for delivering process gases for semiconductor fabrication. These apparatuses for controlling gas flow frequently rely on flow restrictors which can provide a known flow impedance of the process gas. In one embodiment, a flow restrictor is ...