US Patent Issued to IBSS Group on Aug. 11 for "System and method for adaptive cleaning of a high-vacuum chamber" (California Inventors)

ALEXANDRIA, Va., Aug. 12 -- United States Patent no. 12,706,285, issued on Aug. 11, was assigned to IBSS Group (San Francisco).

"System and method for adaptive cleaning of a high-vacuum chamber" was invented by Larry Tran (South San Francisco, Calif.), Vince Carlino (South San Francisco, Calif.) and George Naugle (Morgan Hill, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A system and a method for an adaptive plasma-cleaning process for a reaction chamber allow continual monitoring by a residual gas analyzer, while active plasma-cleaning is carried out in the reaction chamber. The system includes a valve system and a pump system that allow the residual gas analyzer to perform continual monitoring at ...