US Patent Issued to HyperLight on March 17 for "Lithium niobate devices fabricated using deep ultraviolet radiation" (Massachusetts Inventors)

ALEXANDRIA, Va., March 17 -- United States Patent no. 12,578,505, issued on March 17, was assigned to HyperLight Corp. (Cambridge, Mass.).

"Lithium niobate devices fabricated using deep ultraviolet radiation" was invented by Mian Zhang (Cambridge, Mass.) and Kevin Luke (Cambridge, Mass.).

According to the abstract* released by the U.S. Patent & Trademark Office: "An optical device is described. At least a portion of the optical device includes lithium niobate and is fabricated utilizing ultraviolet lithography. In some aspects the at least the portion of the optical device is fabricated using deep ultraviolet lithography. In some aspects, the short range root mean square surface roughness of a sidewall of the at least the portion of the o...