US Patent Issued to HORIBA STEC on May 19 for "Analysis device, analysis method, and analysis program" (Japanese Inventors)

ALEXANDRIA, Va., May 19 -- United States Patent no. 12,633,505, issued on May 19, was assigned to HORIBA STEC Co. LTD. (Kyoto, Japan).

"Analysis device, analysis method, and analysis program" was invented by Miyako Hada (Kyoto, Japan), Motonobu Takahashi (Kyoto, Japan), Masakazu Minami (Kyoto, Japan), Yuhei Sakaguchi (Kyoto, Japan), Toru Shimizu (Kyoto, Japan) and Tetsuo Fujii (Kyoto, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "The present invention is aimed to perform precise monitoring of the processed amount by which a workpiece is processed, and includes a measurement unit that measures a concentration or a partial pressure of a reaction product generated while the workpiece is being processed, ...