ALEXANDRIA, Va., Sept. 8 -- United States Patent no. 12,730,288, issued on Sept. 8, was assigned to HITACHI HIGH-TECH Corp. (Tokyo).
"Optical filtering device, method of controlling optical filtering device, and MEMS shutter" was invented by Yasuhiro Yoshimura (Tokyo), Masatoshi Kanamaru (Tokyo), Takanori Aono (Tokyo), Hitoyuki Tomotsune (Tokyo), Yuko Otani (Tokyo) and Nobuhiko Kanzaki (Tokyo).
According to the abstract* released by the U.S. Patent & Trademark Office: "Provided is a highly reliable optical filtering device used as a spatial filter for an optical inspection apparatus and configured to prevent a shutter from sticking to a wall surface of a shutter opening. The optical filtering device includes the shutter openable and close...