US Patent Issued to HITACHI HIGH-TECH on Sept. 15 for "Charged particle beam device" (Japanese Inventors)

ALEXANDRIA, Va., Sept. 15 -- United States Patent no. 12,738,448, issued on Sept. 15, was assigned to HITACHI HIGH-TECH Corp. (Tokyo).

"Charged particle beam device" was invented by Hirohisa Enomoto (Tokyo) and Kenichi Nishinaka (Tokyo).

According to the abstract* released by the U.S. Patent & Trademark Office: "A charged particle beam device includes: an inclination mechanism driving unit configured to generate a driving force; an inclination driving force transmission unit configured to transmit the driving force; and an inclination mechanism unit having first and second load transmission units, first, second and third deformation units, and an inclinable sample holding unit. The first load transmission unit moves in a load direction by...