US Patent Issued to Hitachi High-Tech on May 19 for "Stage device, charged particle beam device, and vacuum device" (Japanese Inventors)

ALEXANDRIA, Va., May 19 -- United States Patent no. 12,633,494, issued on May 19, was assigned to Hitachi High-Tech Corp. (Tokyo).

"Stage device, charged particle beam device, and vacuum device" was invented by Motohiro Takahashi (Tokyo), Masaki Mizuochi (Tokyo), Shuichi Nakagawa (Tokyo), Raifu Yamamoto (Tokyo), Tomotaka Shibazaki (Tokyo), Keiichiro Hosobuchi (Tokyo), Akira Nishioka (Tokyo), Hironori Ogawa (Tokyo) and Takanori Kato (Tokyo).

According to the abstract* released by the U.S. Patent & Trademark Office: "Provided is a stage device comprising a stage, a Z-axis motor that magnetically floats the stage, and an X-axis motor that drives, in one axial direction within a plane, the stage floated by the Z-axis motor, wherein: the X-axi...