ALEXANDRIA, Va., March 17 -- United States Patent no. 12,578,660, issued on March 17, was assigned to Hitachi High-Tech Corp. (Tokyo).
"Image capturing apparatus and image capturing method" was invented by Akira Nishioka (Tokyo), Shuichi Nakagawa (Tokyo), Hideki Sato (Tokyo), Tomotaka Shibazaki (Tokyo), Masaki Mizuochi (Tokyo) and Takanori Kato (Tokyo).
According to the abstract* released by the U.S. Patent & Trademark Office: "[Object]To provide an image capturing apparatus and an image capturing method that can accurately capture an image of a sample irrespective of the presence or absence of thermal expansion by the sample.[Solving Means]An image capturing apparatus includes a table, a chuck having a back surface secured to the table a...