ALEXANDRIA, Va., July 16 -- United States Patent no. 12,670,169, issued on June 30, was assigned to Hitachi High-Tech Corp. (Tokyo).
"Search device, searching method, and plasma processing apparatus" was invented by Yutaka Okuyama (Tokyo), Takeshi Ohmori (Tokyo), Masaru Kurihara (Tokyo) and Hyakka Nakada (Tokyo).
According to the abstract* released by the U.S. Patent & Trademark Office: "A model learning unit learns a prediction model on the basis of learning data, a target setting unit sets a target output parameter value by interpolating between a goal output parameter value and an output parameter value which is the closest to the goal output parameter value in output parameter values in the learning data, a processing condition search...