US Patent Issued to Hitachi High-Tech on Aug. 4 for "Charged particle beam device and vibration-suppressing mechanism" (Japanese Inventors)

ALEXANDRIA, Va., Aug. 5 -- United States Patent no. 12,700,564, issued on Aug. 4, was assigned to Hitachi High-Tech Corp. (Tokyo).

"Charged particle beam device and vibration-suppressing mechanism" was invented by Hiroki Takahashi (Tokyo), Shuichi Nakagawa (Tokyo), Toshihiko Shimizu (Tokyo), Kiyoshi Yabata (Tokyo), Hironori Ogawa (Tokyo) and Jun Etoh (Tokyo).

According to the abstract* released by the U.S. Patent & Trademark Office: "Provided are a vibration-suppressing mechanism that has excellent maintainability and can effectively control vibration of a column, and a charged particle beam device using the same. This charged particle beam device comprises: a sample chamber for accommodating a sample that will serve as an object to be ob...