US Patent Issued to HITACHI HIGH-TECH on Aug. 25 for "Charged particle beam device" (Japanese Inventors)

ALEXANDRIA, Va., Aug. 25 -- United States Patent no. 12,719,010, issued on Aug. 25, was assigned to HITACHI HIGH-TECH Corp. (Tokyo).

"Charged particle beam device" was invented by Yuta Imai (Tokyo), Teruo Kohashi (Tokyo) and Junichi Katane (Tokyo).

According to the abstract* released by the U.S. Patent & Trademark Office: "A charged particle beam device includes: a charged particle source configured to generate a charged particle beam; a scanning unit configured to scan a sample while deflecting the charged particle beam; a detector configured to detect secondary particles emitted from the sample and output a detection signal; and a control unit configured to generate an observation image of the sample based on the detection signal. The c...