US Patent Issued to Hitachi High-Tech on Aug. 25 for "Charged particle beam device" (Japanese Inventors)

ALEXANDRIA, Va., Aug. 25 -- United States Patent no. 12,719,006, issued on Aug. 25, was assigned to Hitachi High-Tech Corp. (Tokyo).

"Charged particle beam device" was invented by Shinichi Murakami (Tokyo), Tomoyo Sasaki (Tokyo), Yuuji Kasai (Tokyo), Yuzuru Mizuhara (Tokyo) and Wen Li (Tokyo).

According to the abstract* released by the U.S. Patent & Trademark Office: "Provided is a charged particle beam device with low blanking noise and improved signal detection accuracy. As means therefor, a charged particle beam device is configured by: a stage where a sample is mountable; a charged particle gun performing charged particle emission to the sample; a voltage source; a first switching circuit to which a voltage is supplied from the voltag...