US Patent Issued to Hitachi High-Tech on Aug. 25 for "Charged particle beam apparatus" (Japanese Inventors)

ALEXANDRIA, Va., Aug. 25 -- United States Patent no. 12,719,013, issued on Aug. 25, was assigned to Hitachi High-Tech Corp. (Tokyo).

"Charged particle beam apparatus" was invented by Tetsuro Kadowaki (Tokyo), Takeyoshi Ohashi (Tokyo) and Takuma Yamamoto (Tokyo).

According to the abstract* released by the U.S. Patent & Trademark Office: "The present disclosure makes it possible to shorten the time required for measurement of a sample and to measure the sample with high throughput. A charged particle beam apparatus includes a storage device that stores a correction value table corresponding to a recipe and a computer system that executes measurement on a plurality of measurement points of a sample according to a measurement order determined...