US Patent Issued to Hitachi High-Tech on Aug. 18 for "Stage device, charged particle beam apparatus, and vacuum apparatus" (Japanese Inventors)

ALEXANDRIA, Va., Aug. 18 -- United States Patent no. 12,712,145, issued on Aug. 18, was assigned to Hitachi High-Tech Corp. (Tokyo).

"Stage device, charged particle beam apparatus, and vacuum apparatus" was invented by Motohiro Takahashi (Tokyo), Masaki Mizuochi (Tokyo), Raifu Yamamoto (Tokyo) and Yasuhiro Ando (Tokyo).

According to the abstract* released by the U.S. Patent & Trademark Office: "A stage device is disposed in a vacuum environment and moves a target placed on the stage device, the stage device including: a guide rail that is laid on a base; a carriage that moves along the guide rail; rolling elements that come into contact with the guide rail and the carriage and rotate along with the movement of the carriage; a table that i...