US Patent Issued to Hitachi High-Tech on Aug. 18 for "Charged particle beam device, charged particle beam system, and adjustment method" (Japanese Inventors)

ALEXANDRIA, Va., Aug. 18 -- United States Patent no. 12,712,148, issued on Aug. 18, was assigned to Hitachi High-Tech Corp. (Tokyo).

"Charged particle beam device, charged particle beam system, and adjustment method" was invented by Jinyu Zhao (Tokyo), Ayumi Doi (Tokyo), Aoi Yamauchi (Tokyo) and Shuichiro Takahashi (Tokyo).

According to the abstract* released by the U.S. Patent & Trademark Office: "To correct a difference in signal intensity due to a difference in hardware, for example, temporal deterioration of the hardware in the same device, or a difference in signal intensity between different devices. An adjustment method according to the disclosure specifies an amplification gain with which the same detection signal intensity as tha...