ALEXANDRIA, Va., April 21 -- United States Patent no. 12,609,269, issued on April 21, was assigned to Hitachi High-Tech Corp. (Tokyo).
"Inspection system" was invented by Natsuki Tsuno (Tokyo), Yasuhiro Shirasaki (Tokyo), Minami Shouji (Tokyo), Daisuke Bizen (Tokyo), Makoto Suzuki (Tokyo), Satoshi Takada (Tokyo) and Yohei Nakamura (Tokyo).
According to the abstract* released by the U.S. Patent & Trademark Office: "This inspection system 100 comprises: an electron source 102 which irradiates a sample 200 with an inspection beam; a detector 105 which detects secondary electrons obtained by irradiating the sample 200 with the inspection beam and outputs a detection signal; a laser device 107 which emits an action laser that changes the amoun...