ALEXANDRIA, Va., April 21 -- United States Patent no. 12,609,274, issued on April 21, was assigned to Hitachi High-Tech Corp. (Tokyo).
"Charged particle beam device" was invented by Minami Shouji (Tokyo), Yasuhiro Shirasaki (Tokyo), Natsuki Tsuno (Tokyo), Hirohiko Kitsuki (Tokyo) and Hiroya Ohta (Tokyo).
According to the abstract* released by the U.S. Patent & Trademark Office: "An object of the invention is to obtain an observation image in which a plurality of pieces of feature data of a sample are emphasized in a charged particle beam device that acquires an observation image of the sample by irradiating the sample with a charged particle beam and light. The charged particle beam device according to the invention calculates a sequence ...