ALEXANDRIA, Va., Sept. 24 -- United States Patent no. 12,743,028, issued on Sept. 22, was assigned to GUDENG EQUIPMENT Co. LTD. (New Taipei City, Taiwan).
"Reticle clamping module" was invented by Yu-Lin Chen (New Taipei City, Taiwan), Bing-Hong Tsai (New Taipei City, Taiwan) and Wei-Chen Wang (New Taipei City, Taiwan).
According to the abstract* released by the U.S. Patent & Trademark Office: "A reticle clamping module includes two clamping mechanisms and a plurality of anti-slip filler members. The two clamping mechanisms are disposed opposite to each other to form a reticle space. Each of the two clamping mechanisms includes a clamping member and a power member. A reticle contact surface of the clamping member is provided with a first ...