US Patent Issued to GUDENG EQUIPMENT on June 2 for "Inspection device for sub-element of reticle pod" (Taiwanese Inventors)

ALEXANDRIA, Va., June 2 -- United States Patent no. 12,644,791, issued on June 2, was assigned to GUDENG EQUIPMENT Co. LTD. (New Taipei City, Taiwan).

"Inspection device for sub-element of reticle pod" was invented by Yin-Feng Chan (New Taipei City, Taiwan), Lin-Hsin Tu (New Taipei City, Taiwan) and Ming-Mo Lo (New Taipei City, Taiwan).

According to the abstract* released by the U.S. Patent & Trademark Office: "An inspection device for a sub-element of a reticle pod comprises a carrier platform, a light source module, a camera module and a control module. The light source module includes a coaxial light source and a height adjustment mechanism. The height adjustment mechanism is connected to at least one of the coaxial light source and th...