US Patent Issued to GMEMS Technologies on April 7 for "Micromachined capacitive flow sensor, packaged flow sensor product comprising the same, and method thereof" (California Inventors)

ALEXANDRIA, Va., April 7 -- United States Patent no. 12,596,023, issued on April 7, was assigned to GMEMS Technologies Inc. (San Ramon, Calif.).

"Micromachined capacitive flow sensor, packaged flow sensor product comprising the same, and method thereof" was invented by Yunlong Wang (San Ramon, Calif.), Guanghua Wu (Dublin, Calif.) and Maoxiang Guo (Milpitas, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A micromachined capacitive flow sensor includes a movable membrane having one or more venting holes and a perforated backplate having perforation holes or through holes. A gas gap (such as an air gap) is formed between the movable membrane and the perforated backplate. The movable membrane, the gas ga...