US Patent Issued to Gigaphoton on Sept. 8 for "Electronic device manufacturing method and lithography control processor" (Japanese Inventor)

ALEXANDRIA, Va., Sept. 8 -- United States Patent no. 12,730,385, issued on Sept. 8, was assigned to Gigaphoton Inc. (Tochigi, Japan).

"Electronic device manufacturing method and lithography control processor" was invented by Koichi Fujii (Oyama, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "An electronic device manufacturing method includes performing scanning exposure in which plural scan fields of a first photosensitive substrate are exposed to pulse laser light having a reference wavelength, measuring overlay errors at plural positions in each of the plural scan fields, calculating the average of the overlay errors at each of the plural positions in scan fields scanned in the same scan direction ou...