US Patent Issued to Gigaphoton on June 30 for "Extreme ultraviolet light generation system and electronic device manufacturing method" (Japanese Inventors)

ALEXANDRIA, Va., July 16 -- United States Patent no. 12,669,756, issued on June 30, was assigned to Gigaphoton Inc. (Tochigi, Japan).

"Extreme ultraviolet light generation system and electronic device manufacturing method" was invented by Yuichi Nishimura (Oyama, Japan), Yoshifumi Ueno (Oyama, Japan) and Kotaro Miyashita (Oyama, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "An extreme ultraviolet light generation system includes a chamber including a first region; a target supply unit supplying a target to the first region; a laser device outputting pulse laser light; an optical system including an optical element to guide the pulse laser light to the first region; an irradiation position adjustment m...