US Patent Issued to Gigaphoton on July 28 for "Laser apparatus and electronic device manufacturing method" (Japanese Inventors)

ALEXANDRIA, Va., July 28 -- United States Patent no. 12,695,264, issued on July 28, was assigned to Gigaphoton Inc. (Tochigi, Japan).

"Laser apparatus and electronic device manufacturing method" was invented by Yousuke Fujimaki (Oyama, Japan) and Osamu Wakabayashi (Oyama, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A laser apparatus includes an oscillation stage laser configured to generate and output a pulse laser beam, and an amplification stage laser configured to amplify the pulse laser beam output from the oscillation stage laser. The amplification stage laser includes an optical resonator configured to be a transfer optical system, a first discharge electrode pair and a second discharge electr...