US Patent Issued to FUJI ELECTRIC on March 31 for "Analysis method, storage medium, and manufacturing method of semiconductor device" (Japanese Inventor)

ALEXANDRIA, Va., March 31 -- United States Patent no. 12,591,000, issued on March 31, was assigned to FUJI ELECTRIC Co. LTD. (Kanagawa, Japan).

"Analysis method, storage medium, and manufacturing method of semiconductor device" was invented by Yusuke Shimizu (Matsumoto-city, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "Provided is an analysis method including acquiring measurement values of a characteristic of a plurality of semiconductor devices of a measurement group in which a concentration of a first impurity and an irradiation amount of a charged particle beam are included in a set range, generating a measurement distribution showing a distribution, in the measurement group, of the measurement v...