US Patent Issued to FEI on Oct. 6 for "Systems and methods for accurate layer detection and analysis in charged particle microscopes" (Czech Inventors)

ALEXANDRIA, Va., Oct. 6 -- United States Patent no. 12,754,108, issued on Oct. 6, was assigned to FEI Co. (Hillsboro, Ore.).

"Systems and methods for accurate layer detection and analysis in charged particle microscopes" was invented by Zoltan Oremus (Brno, Czech Republic), Petra Binknerova (Radesinska Svratka, Czech Republic) and Hana Sandova (Milicovice, Czech Republic).

According to the abstract* released by the U.S. Patent & Trademark Office: "Embodiments of the present disclosure enable identification, labeling, and isolation of a specific layer within a complex, three-dimensional structure such as a semiconductor memory structure. In particular, the systems and methods described herein can identify a specific layer such as a wordlin...