US Patent Issued to FEI on March 3 for "Critical dimension measurement in 3D with geometric models" (American, Dutch, French Inventors)

ALEXANDRIA, Va., March 3 -- United States Patent no. 12,567,165, issued on March 3, was assigned to FEI Co. (Hillsboro, Ore.).

"Critical dimension measurement in 3D with geometric models" was invented by John Flanagan (Hillsboro, Ore.), Mary Wu (Fremont, Calif.), Erik Franken (Nuenen, Netherlands) and Daniel Lichau (Merignac, France).

According to the abstract* released by the U.S. Patent & Trademark Office: "Methods include acquiring a series of images or spectra of a volume of a model sample, reconstructing a 3D image of the volume of the model sample using the series of images, constructing a 3D model of the volume of the model sample by forming a segmentation of the reconstructed 3D image and fitting one or more primitive geometrical ...