US Patent Issued to FEI on April 7 for "FIB and SEM resolution enhancement using asymmetric probe deconvolution" (Dutch, American Inventors)

ALEXANDRIA, Va., April 7 -- United States Patent no. 12,597,583, issued on April 7, was assigned to FEI Co. (Hillsboro, Ore.).

"FIB and SEM resolution enhancement using asymmetric probe deconvolution" was invented by Galen Gledhill (Portland, Ore.) and Alexander Henstra (Eindhoven, Netherlands).

According to the abstract* released by the U.S. Patent & Trademark Office: "Elongated or other non-circular charged-particle beams (CPBs) are used to produce substrate images that can be processed such as by deconvolution to produce a final image. In some cases, first and second images associated with an asymmetric CPB beams aligned along parallel axes are deconvolved and then combined to produce the final image or combined and then deconvolved to...