US Patent Issued to FEI on April 21 for "Mixed-gas species plasma source system" (Oregon Inventors)

ALEXANDRIA, Va., April 21 -- United States Patent no. 12,609,276, issued on April 21, was assigned to FEI Co. (Hillsboro, Ore.).

"Mixed-gas species plasma source system" was invented by David Levi (Hillsboro, Ore.), Kevin Kagarice (Hillsboro, Ore.) and Daniel Totonjian (Hillsboro, Ore.).

According to the abstract* released by the U.S. Patent & Trademark Office: "An ion beam system including a plasma source tube defining a plasma source chamber, a first gas reservoir housing a first gas, a second gas reservoir housing a second gas, a first controller fluidly coupled to the first gas reservoir and configured to control a first flow rate of the first gas, and a second controller fluidly coupled to the second gas reservoir and configured to c...