US Patent Issued to Exo Imaging on Aug. 11 for "Integration techniques for micromachined pMUT arrays and electronics using solid liquid interdiffusion (SLID)" (California, Massachusetts Inventors)

ALEXANDRIA, Va., Aug. 12 -- United States Patent no. 12,704,626, issued on Aug. 11, was assigned to Exo Imaging Inc. (Santa Clara, Calif.).

"Integration techniques for micromachined pMUT arrays and electronics using solid liquid interdiffusion (SLID)" was invented by Brian Bircumshaw (Oakland, Calif.) and Sandeep Akkaraju (Wellesley, Mass.).

According to the abstract* released by the U.S. Patent & Trademark Office: "The present disclosure provides methods to integrate pMUT arrays with an ASIC using solid liquid interdiffusion (SLID). In an aspect, the present disclosure provides a device comprising a first substrate and a second substrate, the first substrate comprising a pMUT device and the second substrate comprising an electrical circu...