ALEXANDRIA, Va., Aug. 12 -- United States Patent no. 12,706,584, issued on Aug. 11, was assigned to EPIC MEMS (XIAMEN) Co. LTD (Xiamen, China).
"Acoustic wave device and filter" was invented by Bohua Peng (Xiamen, China), Nianchu Hu (Xiamen, China) and Bin Jia (Xiamen, China).
According to the abstract* released by the U.S. Patent & Trademark Office: "An acoustic wave device and a filter. The acoustic wave device comprises: a substrate, a lower electrode layer, a piezoelectric layer, and an upper electrode layer, which are sequentially stacked from bottom to top, where at least one air cavity is disposed in the substrate at a region corresponding to the upper electrode layer, and at least one of: a first hanging bridge is located at a por...