US Patent Issued to ENTEGRIS on Sept. 8 for "Extreme ultraviolet inner pod seal gap" (Minnesota Inventor)

ALEXANDRIA, Va., Sept. 8 -- United States Patent no. 12,730,371, issued on Sept. 8, was assigned to ENTEGRIS INC. (Billerica, Mass.).

"Extreme ultraviolet inner pod seal gap" was invented by Russ V. Raschke (Chanhassen, Minn.).

According to the abstract* released by the U.S. Patent & Trademark Office: "An apparatus includes a reticle pod. The reticle pod includes a baseplate having a first surface, a cover having a second surface, and a stand-off mechanism on at least one of the cover and the baseplate. The first surface includes a first sealing surface on a periphery of the baseplate. The second surface includes a second sealing surface on a periphery of the cover. The stand-off mechanism is configured to create a linear gap between the ...