US Patent Issued to Entegris on Oct. 20 for "Wafer container and purge system" (Colorado, Minnesota, Texas Inventors)

ALEXANDRIA, Va., Oct. 21 -- United States Patent no. 12,767,415, issued on Oct. 20, was assigned to Entegris Inc. (Billerica, Mass.).

"Wafer container and purge system" was invented by Matthew A. Fuller (Colorado Springs, Colo.), Colton J. Harr (Monument, Colo.), Gary Gallagher (Austin, Texas), Peter D. Doenges (Chaska, Minn.) and Thomas H. Wilkie (Colorado Springs, Colo.).

According to the abstract* released by the U.S. Patent & Trademark Office: "In a wafer container, diffusers are positioned such that they are closer to a center line of the wafer container. This improves the distribution of purge gas within the wafer container. The diffusers can be positioned such that their position corresponds to a recessed central panel of the back ...