US Patent Issued to Entegris on Feb. 24 for "Microelectronic device cleaning composition" (South Korean, American Inventors)

ALEXANDRIA, Va., Feb. 24 -- United States Patent no. 12,559,704, issued on Feb. 24, was assigned to Entegris Inc. (Billerica, Mass.).

"Microelectronic device cleaning composition" was invented by Elizabeth Thomas (New Milford, Conn.), Michael L. White (Ridgefield, Conn.), Atanu K. Das (Southbury, Conn.), Daniela White (Ridgefield, Conn.), YoungMin Kim (Suwon-si, South Korea) and Jun Liu (Newtown, Conn.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A composition for cleaning a microelectronic device substrate is provided. The composition is useful for cleaning in-process microelectronic device substrates possessing exposed cobalt, molybdenum, copper, molybdenum, tungsten, and dielectric surfaces. Also provid...