US Patent Issued to ENTEGRIS on Aug. 4 for "Reticle pod having coated sensor zones" (Minnesota Inventors)

ALEXANDRIA, Va., Aug. 5 -- United States Patent no. 12,701,958, issued on Aug. 4, was assigned to ENTEGRIS INC. (Billerica, Mass.).

"Reticle pod having coated sensor zones" was invented by Russ V. Raschke (Chanhassen, Minn.) and Huaping Wang (Eden Prairie, Minn.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Sensor zones are created on an inner pod of a reticle container using a dry coating method. The sensor zones are discrete zones having a specific spectral reflectivity. The sensor zones are positioned such that they can be read by a tool to determine distance of portions of the pod. The use of discrete zones and a dry coating method for applying those discrete zones overcomes issues with inconsistency an...