ALEXANDRIA, Va., Aug. 12 -- United States Patent no. 12,707,928, issued on Aug. 11, was assigned to ENTEGRIS INC. (Billerica, Mass.).
"Substrate container with mechanically actuated exhaust valve" was invented by Matthew A. Fuller (Colorado Springs, Colo.), Mark V. Smith (Colorado Springs, Colo.) and Colton J. Harr (Monument, Colo.).
According to the abstract* released by the U.S. Patent & Trademark Office: "A system is provided. The system includes a substrate container having at least two purge modules. Each purge module of the at least two purge modules includes a flow control device. The flow control device of each purge module is configured to be actuated for egress of a purge fluid. A method of actuating flow control devices of purg...