US Patent Issued to ENCHIP ENTERPRISE on March 31 for "Semiconductor processing system, and control assembly and method thereof" (Arizona Inventor)

ALEXANDRIA, Va., March 31 -- United States Patent no. 12,590,371, issued on March 31, was assigned to ENCHIP ENTERPRISE LLC (Chandler, Ariz.).

"Semiconductor processing system, and control assembly and method thereof" was invented by Julian Juuchuan Hsieh (Chandler, Ariz.).

According to the abstract* released by the U.S. Patent & Trademark Office: "This disclosure relates to a semiconductor processing system, and control assembly and method thereof. The semiconductor processing system includes a mass flow controller (MFC), a control assembly and a process chamber. The MFC is coupled to a gas source to receive an input gas. The control assembly, which is coupled to the MFC, includes a charge chamber, an inlet valve and an outlet valve. The...