US Patent Issued to Elemental Scientific on Aug. 18 for "Systems for integrated decomposition and scanning of a semiconducting wafer" (American, South Korean Inventors)

ALEXANDRIA, Va., Aug. 18 -- United States Patent no. 12,713,869, issued on Aug. 18, was assigned to Elemental Scientific Inc. (Omaha, Neb.).

"Systems for integrated decomposition and scanning of a semiconducting wafer" was invented by Tyler Yost (Omaha, Neb.), Daniel R. Wiederin (Omaha, Neb.), Beau A. Marth (La Vista, Neb.), Jared Kaser (Fort Collins, Colo.), Jonathan Hein (Elkhorn, Neb.), Jae Seok Lee (Burford, Ga.), Jae Min Kim (Gyeonggi-do, South Korea) and Stephen H. Sudyka (Omaha, Neb.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Systems and methods are described for integrated decomposition and scanning of a semiconducting wafer, where a single chamber is utilized for decomposition and scanning of th...